Backed by a team of experienced and well-trained professionals, we are involved in offering
Multi Stage Roots Pumps.
Widely used in light duty processes, load-lock & transfer chambers
and semiconductor industries, the offered pumps are vastly appraised for
their outstanding performance. Owing to the reliable performance,
strong construction and longer service life, these efficient pumps are
vastly sought after.
Features:- Optimum performance
- Rugged in construction
- High throughput
Advantages:- High throughput
- Small dimensions
- Optimized assembly
- Low operating costs
Applications:- Load-lock and transfer chambers
- Semiconductor production
- Photovoltaic
Details:Integrated pumps of the A100 Series for Light Duty Processes:The
pumps of the A100 series with their compact dimensions were
specifically developed for flexible integration in semiconductor
production facilities. Designed for installation directly on the tool
and fast pump down, this series of compact pumps for light applications
is the perfect solution for load-lock and transfer chambers as well as
for all other non-corrosive applications. Integrated pumps set standards
Since the market integration of the A 100 L pumps, they have
revolutionized the integration of pumps in production facilities for the
semiconductor industry. Based on dry multi-stage Roots technology and
despite their small dimensions, the pumps of the A100 series offer high
pumping speeds and short pump down times. Today, integrated light duty
pumps are state of the art and the A100 series is installed worldwide in
many 300 mm semiconductor fabs.
Integrated Pumps for Load-lock and Transfer Chambers:In
light duty applications like load-lock and transfer chambers, these
pumps rule out vacuum line effects in pump installations. Installation
costs for vacuum lines, integration and commissioning are lowered
through the use of the A100 series. The pumps offer reproducible
performance during production and are energy efficient. High reliability
and long-term stability distinguish the pumps of the A100 series.
Integrated pumps - not just for the semiconductor industry:With
dry and particle-free vacuums, short pump down times and high pumping
speeds, the pumps from the A100 series offer optimal solutions also
outside of the semiconductor industry as on photovoltaic equipment for
example. Low sound emission and low vibrations are further
characteristics of this water-cooled series. The low dimensions
guarantee a simple integration in production facilities.
